Quantemol-DB: Surface Processes
| Process | Description |
|---|---|
| Sticking Coefficients | Sticking coefficients for various neutrals to be used in plasma simulations. |
| Etching Mechanisms | Etching reaction schemes to be used in site-based surface models or feature profile models |
| Deposition Mechanisms | Deposition reaction schemes to be used in site-base surface models or feature profile models |