Surface data

Deposition mechanisms

Surface reaction mechanisms and coefficient data used for plasma deposition models.

Available surface data

4 surface data subsets

Deposition Mechanisms

Deposition reaction schemes to be used in site-base surface models or feature profile models

S10 Copper Deposition Copper Vapor Deposition on a silicon dioxide surface S11 Fluorocarbon Polymer Deposition Flurocarbon deposition on a generic surface such as chamber walls S12 Fluorocarbon Polymer Deposition and Removal Flurocarbon deposition on a generic surface such as chamber walls, includes sputtering by ions S17 Polymer Deposition on Silicon Dioxide Fluorocarbon deposition on silicon dioxide. Explicitly includes activation of polymer surface sites.