Surface data

Sticking coefficients

Surface sticking probability data grouped by gas species, surface, and source context.

Available surface data

4 surface data subsets

Sticking Coefficients

Sticking coefficients for various neutrals to be used in plasma simulations.

S3 Fluorine Sticking coefficients for fluorine species on various surfaces. S4 Fluorocarbons Sticking Coefficients for Flurocarbon Species on Various Surfaces S1 Oxygen Sticking coefficients for oxygen species on various surfaces. S5 Silane Sticking Coefficients for Silane Radicals