Sticking Coefficients
| Subset | Description |
|---|---|
| Oxygen | Sticking coefficients for oxygen species on various surfaces. |
| Fluorine | Sticking coefficients for fluorine species on various surfaces. |
| Fluorocarbons | Sticking Coefficients for Flurocarbon Species on Various Surfaces |
| Silane | Sticking Coefficients for Silane Radicals |